[IEEE 2017 Winter Simulation Conference (WSC) - Las Vegas, NV (2017.12.3-2017.12.6)] 2017 Winter Simulation Conference (WSC) - Simulation-based performance assessment of an implant scheduler in semiconductor manufacturing
Winkler, Thomas, Sprenger, RalfYear:
2017
DOI:
10.1109/WSC.2017.8248083
File:
PDF, 331 KB
2017