Impurity Gettering by Atomic-Layer-Deposited Aluminium...

physica status solidi (RRL) - Rapid Research Letters 2018 / 03 Vol. 12; Iss. 3

Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures (Phys. Status Solidi RRL 3/2018)

Liu, AnYao, Macdonald, Daniel
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Volume:
12
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201870309
Date:
March, 2018
File:
PDF, 391 KB
2018
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