Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition
Bénédic, Fabien, Baudrillart, Benoit, Achard, Jocelyn, Alves, Luis Lemos, Belmonte, Thierry, Minea, TiberiuVolume:
81
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2017170238
Date:
January, 2018
File:
PDF, 561 KB
english, 2018