Role of fringing field on the electrical characteristics of metal-oxide-semiconductor capacitors with co-planar and edge-removed oxides
Yang, Chang-Feng, Hwu, Jenn-GwoVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4971845
Date:
December, 2016
File:
PDF, 3.56 MB
english, 2016