Piezoresistive silicon nanowire resonators as embedded...

Journal of Micromechanics and Microengineering 2018 / 04 Vol. 28; Iss. 4

Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

Nasr Esfahani, Mohammad, Kilinc, Yasin, Çagatay Karakan, M, Orhan, Ezgi, Hanay, M Selim, Leblebici, Yusuf, Erdem Alaca, B
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaab2f
Date:
April, 2018
File:
PDF, 1.65 MB
english, 2018
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