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CMOS-compatible Batch Processing of Monolayer MoS2 MOSFETs
Xiong, Kuanchen, Kim, Hyun, Marstell, Roderick J., Göritz, Alexander, Wipf, Christian, Li, Lei, Park, Ji-Hoon, Luo, Xi, Wietstruck, Matthias, Madjar, Asher, Strandwitz, Nicholas C, Kaynak, Mehmet, LeeLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aab4ba
Date:
March, 2018
File:
PDF, 876 KB
english, 2018