The stability of a novel weakly alkaline slurry of copper interconnection CMPfor GLSI
Yao, Caihong, Wang, Chenwei, Niu, Xinhuan, Wang, Yan, Tian, Shengjun, Jiang, Zichao, Liu, YulingVolume:
39
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/39/2/026002
Date:
February, 2018
File:
PDF, 7.56 MB
english, 2018