Fabrication and Study of Parameters and Properties of...

Nanotechnologies in Russia 2017 / 7 Vol. 12; Iss. 7-8

Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices

Dyuzhev, N. A., Gusev, E. E., Gryazneva, T. A., Dedkova, A. A., Dronova, D. A., Kireev, V. Yu., Kirilenko, E. P., Migunov, D. M., Novikov, D. V., Patyukov, N. N., Presnukhina, A. A., Bakun, A. D., Erm
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
12
Language:
english
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078017040073
Date:
July, 2017
File:
PDF, 2.17 MB
english, 2017
Conversion to is in progress
Conversion to is failed