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Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
Dyuzhev, N. A., Gusev, E. E., Gryazneva, T. A., Dedkova, A. A., Dronova, D. A., Kireev, V. Yu., Kirilenko, E. P., Migunov, D. M., Novikov, D. V., Patyukov, N. N., Presnukhina, A. A., Bakun, A. D., ErmVolume:
12
Language:
english
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078017040073
Date:
July, 2017
File:
PDF, 2.17 MB
english, 2017