An error self-compensation mechanism for deposition of...

Moscow University Physics Bulletin 2017 / 5 Vol. 72; Iss. 3

An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring

Tikhonravov, A. V., Kochikov, I. V., Trubetskov, M. K., Sharapova, S. A., Zhupanov, V. G., Yagola, A. G.
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Volume:
72
Language:
english
Journal:
Moscow University Physics Bulletin
DOI:
10.3103/S0027134917030134
Date:
May, 2017
File:
PDF, 591 KB
english, 2017
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