Effect of surface roughness of trench sidewalls on...

Japanese Journal of Applied Physics 2018 / 04 Vol. 57; Iss. 4S

Effect of surface roughness of trench sidewalls on electrical properties in 4H-SiC trench MOSFETs

Kutsuki, Katsuhiro, Murakami, Yuki, Watanabe, Yukihiko, Onishi, Toru, Yamamoto, Kensaku, Fujiwara, Hirokazu, Ito, Takahiro
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.04FR02
Date:
April, 2018
File:
PDF, 1.04 MB
english, 2018
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