Growth of High-Quality AlN and AlGaN Films on Sputtered...

  • Main
  • 2018 / 03
  • Growth of High-Quality AlN and AlGaN Films on Sputtered...
physica status solidi (b) 2018 / 03

Growth of High-Quality AlN and AlGaN Films on Sputtered AlN/Sapphire Templates via High-Temperature Annealing

Hakamata, Junya, Kawase, Yuta, Dong, Lin, Iwayama, Sho, Iwaya, Motoaki, Takeuchi, Tetsuya, Kamiyama, Satoshi, Miyake, Hideto, Akasaki, Isamu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201700506
Date:
March, 2018
File:
PDF, 1.10 MB
english, 2018
Conversion to is in progress
Conversion to is failed