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Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer
Shi, Huichao, Fan, Shangchun, Li, WenlongVolume:
24
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3599-y
Date:
April, 2018
File:
PDF, 728 KB
english, 2018