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Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
Choi, Taejin, Yeo, Seungmin, Song, Jeong-Gyu, Seo, Seunggi, Jang, Byeonghyeon, Kim, Soo-Hyun, Kim, HyungjunVolume:
344
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.082
Date:
June, 2018
File:
PDF, 1.23 MB
english, 2018