Electron series resonance in a magnetized 13.56 MHz...

Journal of Applied Physics 2018 / 03 Vol. 123; Iss. 11

Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge

Joshi, J. K., Binwal, S., Karkari, S. K., Kumar, Sunil
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Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5009484
Date:
March, 2018
File:
PDF, 1.62 MB
english, 2018
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