[IEEE 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore (2016.7.18-2016.7.21)] 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Advanced coating techniques for photoresist TEM sample preparation
Sebastian, Elizabeth, Tee, Irene, Shen, Yiqiang, Lee, Kok Wah, Tam, Lai Kuan, Zhu, Jie, Zhao, SipingYear:
2016
DOI:
10.1109/ipfa.2016.7564259
File:
PDF, 258 KB
2016