MEMS Industry-Worth Etching to Fabricate Tapered Structures...

Journal of Microelectromechanical Systems 2017 / 12 Vol. 26; Iss. 6

MEMS Industry-Worth Etching to Fabricate Tapered Structures in SiO 2

Bliznetsov, Vladimir, Li, Bin, Lee, Jae Wung, Lin, Huamao
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2755046
Date:
December, 2017
File:
PDF, 2.31 MB
english, 2017
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