Dynamics Model and Vibration Control of Piezoelectric...

IEEE Transactions on Semiconductor Manufacturing 2018 / 2 Vol. 31; Iss. 1

Dynamics Model and Vibration Control of Piezoelectric Feeder in Semiconductor Manufacturing Assembly

Long, Zhili, Shen, Hao, Zhang, Jianguo, Zhao, Shuang, Lin, Yongcheng, Li, Zuohua
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Volume:
31
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2017.2768620
Date:
February, 2018
File:
PDF, 2.75 MB
english, 2018
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