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[IEEE 1999 7th IEEE Conference on Emerging Technologies and Factory Automation. ETFA'99 - Barcelona, Spain (18-21 Oct. 1999)] 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation. Proceedings ETFA '99 (Cat. No.99TH8467) - Development of a generic equipment manager for semiconductor manufacturing
Haw-Ching Yang,, Fan-Tien Cheng,, Huang, D.Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/etfa.1999.815426
File:
PDF, 544 KB
english, 1999