DRIE Trenches and Full-Bridges for Improving Sensitivity of...

Journal of Microelectromechanical Systems 2017 / 10 Vol. 26; Iss. 5

DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor

Ye, Yizhou, Yi, Zhenxiang, Gao, Shixuan, Qin, Ming, Huang, Qing-An
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2707558
Date:
October, 2017
File:
PDF, 2.55 MB
english, 2017
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