Coefficient of thermal expansion and biaxial Young's...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 03 Vol. 36; Iss. 2

Coefficient of thermal expansion and biaxial Young's modulus in Si-rich silicon nitride thin films

Habermehl, Scott
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5020432
Date:
March, 2018
File:
PDF, 1.10 MB
english, 2018
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