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Obtaining of superhydrophobic surface in RF capacitively coupled discharge in AR/CH 4 medium
Orazbayev, Sagi, Gabdullin, Maratbek, Ramazanov, Tlekkabul, Dosbolayev, Merlan, Omirbekov, Dulat, Yerlanuly, YerassylLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.03.118
Date:
March, 2018
File:
PDF, 1.14 MB
english, 2018