Effect of helium ion beam treatment on wet etching of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2018 / 03 Vol. 418

Effect of helium ion beam treatment on wet etching of silicon dioxide

Petrov, Yu.V., Grigoryev, E.A., Sharov, T.V., Baraban, A.P.
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Volume:
418
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2018.01.011
Date:
March, 2018
File:
PDF, 1.48 MB
english, 2018
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