Tailoring of titanium thin film properties in high power...

Vacuum 2018 / 04 Vol. 150

Tailoring of titanium thin film properties in high power pulsed magnetron sputtering

Wu, Baohua, Yu, Yan, Wu, Jian, Shchelkanov, Ivan, Ruzic, David N., Huang, Nan, Leng, Y.X.
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Volume:
150
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.01.039
Date:
April, 2018
File:
PDF, 2.36 MB
english, 2018
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