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[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Segment removal strategy in SAQP for advanced BEOL application

Chen, James Hsueh-Chung, Spooner, Terry A., Stephens, Jason E., O'Toole, Martin, LiCausi, Nicholas, Kim, Ben, Narasimha, Shreesh, Child, Craig
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Year:
2017
DOI:
10.1109/iitc-amc.2017.7968943
File:
PDF, 720 KB
2017
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