[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Full system for piezoelectric organic MEMS resonators operating in liquid media
Ducrot, Pierre-Henri, Dufour, Isabelle, Nicu, Liviu, Mathieu, Fabrice, Ayela, CedricYear:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994312
File:
PDF, 1.56 MB
english, 2017