Activation of acceptor levels in Mn implanted Si by pulsed...

  • Main
  • 2018 / 03
  • Activation of acceptor levels in Mn implanted Si by pulsed...
Journal of Physics D Applied Physics 2018 / 03

Activation of acceptor levels in Mn implanted Si by pulsed laser annealing

Li, Lin, Bürger, Danilo, Shalimov, Artem, Kovacs, Gy. J., Schmidt, Heidemarie, Zhou, Shengqiang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aab5a6
Date:
March, 2018
File:
PDF, 1.21 MB
english, 2018
Conversion to is in progress
Conversion to is failed