[IEEE 2016 IEEE International Reliability Physics Symposium (IRPS) - Pasadena, CA, USA (2016.4.17-2016.4.21)] 2016 IEEE International Reliability Physics Symposium (IRPS) - New breakdown mechanism investigation: Barrier metal penetration induced soft breakdown in low-k dielectrics
Wu, C., Li, Y., Bommels, J., De Wolf, I., Tokei, Zs., Croes, K.Year:
2016
Language:
english
DOI:
10.1109/irps.2016.7574511
File:
PDF, 792 KB
english, 2016