Effects of sintering processes on the element chemical...

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Journal of Materials Science: Materials in Electronics 2018 / 3

Effects of sintering processes on the element chemical states of In, Sn and O in ITO targets

Qin, Kai, Mei, Fangsheng, Yuan, Tiechui, Li, Ruidi, Jiang, Jun, Niu, Pengda, Chen, Hui
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-018-8843-4
Date:
March, 2018
File:
PDF, 2.08 MB
english, 2018
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