Frame structure for thin-film piezoelectric-on-silicon...

Sensors and Actuators A: Physical 2018 / 05 Vol. 274

Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes

Bao, Fei-Hong, Bao, Lei-Lei, Zhang, Xiao-Sheng, Zhang, Chao, Li, Xin-Yi, Qin, Feng, Zhang, Ting, Zhang, Yi, Wu, Zhao-Hui, Bao, Jing-Fu
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Volume:
274
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.03.012
Date:
May, 2018
File:
PDF, 3.06 MB
english, 2018
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