Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition
Fullager, Daniel B., Boreman, Glenn D., Ellinger, Carolyn D., Hofmann, TinoLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.03.047
Date:
March, 2018
File:
PDF, 638 KB
english, 2018