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Measurements of the contact angle of Noa81 photoresist for different temperatures
Kirichenko, Ekaterina O., Gatapova, Elizaveta Ya., Kuznetsov, G.V., Strizhak, P.A., Zhdanova, A.O.Volume:
92
Year:
2017
Language:
english
Journal:
MATEC Web of Conferences
DOI:
10.1051/matecconf/20179201042
File:
PDF, 485 KB
english, 2017