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Comptes Rendus Chimie 2018 / 3

Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment

Cardinaud, Christophe
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Language:
english
Journal:
Comptes Rendus Chimie
DOI:
10.1016/j.crci.2018.01.009
Date:
March, 2018
File:
PDF, 4.86 MB
english, 2018
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