[IEEE 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Moscow and St. Petersburg, Russia (2018.1.29-2018.2.1)] 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Peculiarities of the influence of nanostructuring of [SiO2/Si3N4]n multilayer membranes on its thermal and mechanical properties

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