Black silicon IR photodiode supersaturated with nitrogen by...

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IEEE Sensors Journal 2018

Black silicon IR photodiode supersaturated with nitrogen by femtosecond laser irradiation

Li, Chun-Hao, Wang, Xue-Peng, Zhao, Ji-Hong, Zhang, De-Zhong, Yu, Xin-Yue, Li, Xian-Bin, Feng, Jing, Chen, Qi-Dai, Ruan, Sheng-Ping, Sun, Hong-Bo
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Year:
2018
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2018.2812730
File:
PDF, 5.21 MB
english, 2018
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