Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 03 Vol. 36; Iss. 2
Emission properties of undoped and boron-doped nanocrystalline diamond films coated silicon carbide field emitter arrays
Ivanov, Oleg A., Bogdanov, Sergey A., Vikharev, Anatoly L., Luchinin, Victor V., Golubkov, Vladimir A., Ivanov, Alexey S., Ilyin, Vladimir A.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5012977
Date:
March, 2018
File:
PDF, 1.37 MB
english, 2018