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Microsystem Technologies 2018 / 3

Relative humidity influence on adhesion effect in MEMS flexible structures

Birleanu, Corina, Pustan, Marius, Rusu, Florina, Dudescu, Cristian, Muller, Raluca, Baracu, Angela
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3848-8
Date:
March, 2018
File:
PDF, 1.54 MB
english, 2018
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