Synthesis of two Aminosilanes as CVD Precursors of SiC...

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Phosphorus Sulfur and Silicon and the Related Elements 2018 / 03

Synthesis of two Aminosilanes as CVD Precursors of SiC x N y Films: Tuning Film Composition by Molecular Structures

Du, Liyong, Bai, Yanlong, Chu, Wenxiang, Ding, Yuqiang
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Language:
english
Journal:
Phosphorus, Sulfur, and Silicon and the Related Elements
DOI:
10.1080/10426507.2018.1455682
Date:
March, 2018
File:
PDF, 786 KB
english, 2018
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