Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 11 Vol. 35; Iss. 6
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Electrophysical parameters of the space charge region of the low-threshold field cathode
Yafyasov, A., Bogevolnov, V.Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4993139
Date:
November, 2017
File:
PDF, 572 KB
english, 2017