Controlling defects in fine-grained sputtered nickel...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 03 Vol. 36; Iss. 2

Controlling defects in fine-grained sputtered nickel catalyst for graphene growth

Zakar, Eugene, Glen Birdwell, A., Hauri, Kevin, Fu, Richard X., Tan, Cheng, Dubey, Madan
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4998441
Date:
March, 2018
File:
PDF, 1.83 MB
english, 2018
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