Recent progress in low-temperature-process monolithic three...

Japanese Journal of Applied Physics 2018 / 04 Vol. 57; Iss. 4S

Recent progress in low-temperature-process monolithic three dimension technology

Yang, Chih-Chao, Hsieh, Tung-Ying, Huang, Wen-Hsien, Shen, Chang-Hong, Shieh, Jia-Min, Yeh, Wen-Kuan, Wu, Meng-Chyi
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.04FA06
Date:
April, 2018
File:
PDF, 1.47 MB
english, 2018
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