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Modification of strain and 2DEG density induced by wafer bending of AlGaN/GaN heterostructure: Influence of edges caused by processing
Wang, Ashu, Zeng, Lingyan, Wang, Wen, Calle, FernandoVolume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5020149
Date:
March, 2018
File:
PDF, 1.74 MB
english, 2018