The application of moiré inversion technique in the...

Optics and Lasers in Engineering 2018 / 07 Vol. 106

The application of moiré inversion technique in the characterization of micro-scale 3D periodic structures

Wu, Dan, Xie, Huimin, Huang, Dejin, Qin, Kun
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Volume:
106
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2018.03.001
Date:
July, 2018
File:
PDF, 2.11 MB
english, 2018
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