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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Design and fabrication of wafer-level packaged MEMS Pirani gauge with sorrounded heat sinks
Kong, Yanmei, Jiao, Binbin, Zhang, Lemin, Yun, Shichang, Chen, DapengYear:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994207
File:
PDF, 1.21 MB
english, 2017