EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
Moura, Cleverson Alves da Silva, Belmonte, Guilherme Kretzmann, Reddy, Pulikanti Guruprasad, Gonslaves, Kenneth E., Weibel, Daniel EduardoVolume:
8
Year:
2018
Language:
english
Journal:
RSC Advances
DOI:
10.1039/c7ra12934c
File:
PDF, 1.40 MB
english, 2018