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[IEEE 2017 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2017.4.2-2017.4.6)] 2017 IEEE International Reliability Physics Symposium (IRPS) - Low-k dielectric degradation study with polarity switch
Yuan, Quan, Patel, Anuj, Brown, Logan, Zhao, Yinghong, Mai, Zack Tran, English, SteveYear:
2017
Language:
english
DOI:
10.1109/IRPS.2017.7936325
File:
PDF, 1.25 MB
english, 2017