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Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation
Duffy, Ray, Ricchio, Alessio, Murphy, Ruaidhrí, Maxwell, Graeme, Murphy, Richard, Piaszenski, Guido, Petkov, Nikolay, Hydes, Alan, O'Connell, Dan, Lyons, Colin, Kennedy, Noel, Sheehan, Brendan, SchmidVolume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5019470
Date:
March, 2018
File:
PDF, 3.91 MB
english, 2018