Diagnosis of phosphorus monolayer doping in silicon based...

Journal of Applied Physics 2018 / 03 Vol. 123; Iss. 12

Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation

Duffy, Ray, Ricchio, Alessio, Murphy, Ruaidhrí, Maxwell, Graeme, Murphy, Richard, Piaszenski, Guido, Petkov, Nikolay, Hydes, Alan, O'Connell, Dan, Lyons, Colin, Kennedy, Noel, Sheehan, Brendan, Schmid
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Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5019470
Date:
March, 2018
File:
PDF, 3.91 MB
english, 2018
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