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[IEEE 2017 1st International Conference on Electronics, Materials Engineering and Nano-Technology (IEMENTech) - Kolkata, India (2017.4.28-2017.4.29)] 2017 1st International Conference on Electronics, Materials Engineering and Nano-Technology (IEMENTech) - Conceptual design of a double antenna fed ECR plasma enhanced nano-film deposition system
Karmakar, Samit, Mukherjee, Shamik, Kundu, Soumik Kumar, Jha, Deepantee, Taki, G.S.Year:
2017
Language:
english
DOI:
10.1109/iementech.2017.8076936
File:
PDF, 368 KB
english, 2017