Treatment of SU-8 surfaces using atmospheric pressure...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 03 Vol. 36; Iss. 2

Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

de Novais Schianti, Juliana, do Nascimento, Fellype, Cordoba Ramirez, Jhonattan, Machida, Munemasa, Gabrielli, Lucas Heitzmann, Hernandez-Figueroa, Hugo Enrique, Moshkalev, Stanislav
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4999045
Date:
March, 2018
File:
PDF, 1.28 MB
english, 2018
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