Shallow Si N + P junction diodes realized via molecular monolayer doping
Tapriya, Astha, Novak, Brian, Williams, Scott, Kurinec, SantoshVolume:
193
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.02.008
Date:
June, 2018
File:
PDF, 1.63 MB
english, 2018