Experimental studies of thorium ion implantation from pulse...

Laser Physics Letters 2018 / 05 Vol. 15; Iss. 5

Experimental studies of thorium ion implantation from pulse laser plasma into thin silicon oxide layers

Borisyuk, P V, Chubunova, E V, Lebedinskii, Yu Yu, Tkalya, E V, Vasilyev, O S, Yakovlev, V P, Strugovshchikov, E, Mamedov, D, Pishtshev, A, Karazhanov, S Zh
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Volume:
15
Language:
english
Journal:
Laser Physics Letters
DOI:
10.1088/1612-202X/aaacf8
Date:
May, 2018
File:
PDF, 1.62 MB
english, 2018
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